Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution

标题
Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution
作者
关键词
-
出版物
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 91, Issue 4, Pages 567-571
出版商
Springer Nature
发表日期
2008-04-30
DOI
10.1007/s00339-008-4515-1

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