期刊
ANNUAL REVIEW OF ANALYTICAL CHEMISTRY
卷 1, 期 -, 页码 261-291出版社
ANNUAL REVIEWS
DOI: 10.1146/annurev.anchem.1.031207.112953
关键词
deposition; etching; surface modification; gas-surface interactions
资金
- National Science Foundation
This review focuses on the use of diagnostic tools to examine plasma processing chemistry, primarily plasma species energetics, dynamics, and molecule-surface reactions. We de-scribe the use of optical diagnostic tools, mass spectrometry, and Langmuir probes in measuring species densities, rotational and kinetic energies, and plasma-surface reactions. Molecule-surface interactions for MXn species (M = C, Si, N; X = H, F, Cl) are presented and interpreted with respect to the molecule's electronic configuration and dipole moments.
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