Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES

标题
Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES
作者
关键词
-
出版物
ANALYTICAL AND BIOANALYTICAL CHEMISTRY
Volume 396, Issue 8, Pages 2725-2740
出版商
Springer Nature
发表日期
2010-01-08
DOI
10.1007/s00216-009-3339-y

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