HF-(NH4)2S2O8-HCl Mixtures for HNO3- and NOx-free Etching of Diamond Wire- and SiC-Slurry-Sawn Silicon Wafers: Reactivity Studies, Surface Chemistry, and Unexpected Pyramidal Surface Morphologies

标题
HF-(NH4)2S2O8-HCl Mixtures for HNO3- and NOx-free Etching of Diamond Wire- and SiC-Slurry-Sawn Silicon Wafers: Reactivity Studies, Surface Chemistry, and Unexpected Pyramidal Surface Morphologies
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 7, Issue 16, Pages 8733-8742
出版商
American Chemical Society (ACS)
发表日期
2015-04-01
DOI
10.1021/acsami.5b01059

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