Polymer derived ceramics in MEMS/NEMS – a review on production processes and application

标题
Polymer derived ceramics in MEMS/NEMS – a review on production processes and application
作者
关键词
-
出版物
Advances in Applied Ceramics
Volume 108, Issue 8, Pages 454-460
出版商
Informa UK Limited
发表日期
2009-12-01
DOI
10.1179/174367609x422171

向作者/读者发起求助以获取更多资源

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More