Air-Bridged Ohmic Contact on Vertically Aligned Si Nanowire Arrays: Application to Molecule Sensors

ADVANCED MATERIALS

卷 24, 期 17, 页码 2284-2288

WILEY-V C H VERLAG GMBH

air-bridged ohmic contact; vertically aligned nanowires; nanowire-based devices; supercritical point dry; metal-assisted chemical etching

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

1. National Research Foundation of Korea (NRF)
2. Ministry of Education, Science and Technology [20110030200]