期刊
ADVANCED MATERIALS
卷 20, 期 7, 页码 1368-+出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.200701719
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A new method for perforating the barrier oxide at the base of pores in alumina, which does not involve etching of the alumina, is reported. Anodization of Al layers on W leads to formation of WO3 Plugs that can be selectively etched without widening the as-anodized pores. We demonstrate this technique, used with templated pore formation, by creating Ni nanoelectrode arrays with fixed electrode spacings (200 nm) but varied electrode diameters.
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