Article
Nanoscience & Nanotechnology
Aleksander B. Mosberg, Dingding Ren, Lyubomir Ahtapodov, Helge Weman, Bjorn-Ove Fimland, Antonius T. J. van Helvoort
Summary: This study demonstrates the direct patterning of a SiO2/Si substrate using focused ion beam (FIB) patterning to control self-catalyzed GaAsSb nanowire growth in molecular beam epitaxy (MBE). FIB patterning parameters influence nanowire yield, composition and structure, with total ion dose per hole being the most important parameter.
Article
Chemistry, Analytical
Michael Haub, Martin Bogner, Thomas Guenther, Andre Zimmermann, Hermann Sandmaier
Summary: This paper introduces a miniaturized accelerometer based on the tunneling effect, which utilizes high sensitivity to detect small deflections in the sub-nanometer range. The spring-mass system is manufactured through surface micro-machining, allowing control over the size of sensor structures and electrode distances. The exponential dependency of sensitivity on electrode distance affects the sensor signal, with a measuring range of 20 g.
Article
Microscopy
A. S. Kolomiytsev, A. L. Gromov, O. I. Il'in, I. Panchenko, A. Kotosonova, A. Ballouk, D. Rodriguez, O. A. Ageev
Summary: The article discusses experimental studies on optimizing the accuracy and resolution of nanoscale profiling using a focused ion beam. The results reveal the influence of various parameters on the nanoscale structures and surface profile and provide guidance for achieving the highest accuracy in nanoscale structure formation.
Article
Chemistry, Physical
Shuo Zhang, Gediminas Gervinskas, Yang Liu, Ross K. W. Marceau, Jing Fu
Summary: This study explores the application of nanoscale in-situ cryo-condensation coating technique on needle-shaped specimens and frozen hydrated cells. By controlling parameters, the properties of the deposited layer can be tuned, revealing surface morphologies and investigating the physical mechanisms of curing. This approach opens a novel route to nanofabrication on tip geometry and site-specific conductive protection.
APPLIED SURFACE SCIENCE
(2021)
Article
Chemistry, Physical
Daehee Seol, Songkil Kim, Woo-Sung Jang, Yeongrok Jin, Seunghun Kang, Sera Kim, Dongyeun Won, Chanwoo Lee, Young-Min Kim, Jaekwang Lee, Heejun Yang, Mun Seok Jeong, Alex Belianinov, Alexander Tselev, Suhas Somnath, Christopher R. Smith, Olga S. Ovchinnikova, Nina Balke, Yunseok Kim
Summary: It has been demonstrated that focused ion beams can create out-of-plane piezoelectricity on multi-layered MoTe2, and the selectively patterned out-of-plane piezoelectricity in the desired area was quantitatively examined using atomic force microscopy. This approach is expected to expand the application fields of TMD-based devices.
Article
Anatomy & Morphology
Soumita Mondal, Ujjval Bansal, Surendra Kumar Makineni
Summary: A new rectangular milling technique using Ga+ FIB instrument has been demonstrated for preparing needle shape APT specimens from Al alloys, resulting in a significant reduction of Ga+ ion impregnation into the specimens.
MICROSCOPY RESEARCH AND TECHNIQUE
(2022)
Article
Chemistry, Multidisciplinary
Sonja Stefanovic, Negar Gheshlaghi, David Zanders, Ivan Kundrata, Baolin Zhao, Maissa K. S. Barr, Marcus Halik, Anjana Devi, Julien Bachmann
Summary: Area-selective atomic layer deposition (AS-ALD) is a bottom-up nanofabrication method that delivers single atoms from a molecular precursor. It offers advantages over lithography in terms of cost, resistance, and equipment prerequisites, but requires pre-patterned substrates and has limited selectivity and substrate choices. These challenges can be overcome with direct patterning using atomic-layer additive manufacturing (ALAM), which enables direct patterning instead of blanket coating. A functional thin-film transistor was created using ALAM-deposited ZnO and characterized.
Article
Materials Science, Multidisciplinary
Rong Wu, M. Tauhiduzzaman, P. Ravi Selvaganapathy
Summary: Recently, there has been a growing interest in methods for creating hydrophobic surfaces, with a low-cost, high-throughput Computer Numerical Control machining method being developed to generate highly hydrophobic and anisotropic surfaces on both metal and polymeric materials. This method, utilizing micro-structured diamond tools, offers at least four times higher machining speed compared to other methods and demonstrates significant anisotropic wetting effects on the machined surfaces.
MATERIALS & DESIGN
(2021)
Article
Chemistry, Multidisciplinary
Liangliang Gu, Han Gao, Haifeng Hu
Summary: We present a simple and robust fiber specklegram refractive index sensor using a multimode fiber-single mode fiber-multimode fiber structure based on focused ion beam milling. Fluid channels are etched on the single-mode fiber to enhance the interaction between light and matter, and a deep learning model is employed for demodulating the sensing signal. Experimental results demonstrate high demodulation accuracy and speed, making it a promising sensing scheme for various chemical and biological applications.
Article
Engineering, Electrical & Electronic
Medhat Samaan, Huseyin Ekinci, Ripon Dey, Xiaoli Zhu, Dmitry Pushin, Bo Cui
Summary: This paper introduces a simple method to convert commercially available standard AFM probes to HAR probes using FIB and plasma etching techniques. Compared to traditional HAR probe fabrication methods, this method significantly reduces the usage of FIB and is suitable for batch production.
MICROELECTRONIC ENGINEERING
(2023)
Article
Chemistry, Physical
Chiu-Yen Wang, An-Hsuan Hsu, Yi-Chen Lin, Ya-Chu Hsu
Summary: Monocrystalline InSe nanowires with a [100] growth direction were successfully prepared via vacuum hydraulic pressure injection at low temperature. The fabricated nanowires were used to create a high-responsivity photodetector with low dark current and rapid rise and fall times.
JOURNAL OF ALLOYS AND COMPOUNDS
(2022)
Article
Nanoscience & Nanotechnology
I. Roslyakov, S. E. Kushnir, M. Tsymbarenko, N. A. Sapoletova, L. A. Trusov, K. S. Napolskii
Summary: The self-ordered anodic aluminium oxide (AAO) structure can increase the domain size by pre-patterning the aluminium surface with a defect-free hexagonal array of concaves. This can be achieved through precise control of the irradiation positions, beam energy, and ion dosage using focused gallium ion beam (Ga FIB) etching. The proposed multi-step anodizing procedure successfully covers a wide range of AAO interpore distances and can prevent gallium contamination.
Article
Physics, Condensed Matter
Yuan Lu, Hao Wang, Yi Chen, Akriti, Xiangchen Hu, Letian Dou, Qixi Mi, Zhijun Ning, Yi Yu
Summary: This study investigates the influence factors of ion beam damage on ion beam-sensitive materials and successfully obtains high-resolution transmission electron microscopy images. Theoretical investigations reveal a rapid temperature rise during ion beam milling, while experimental investigations suggest that choosing appropriate FIB parameters and reducing milling time can alleviate structure damage.
JOURNAL OF PHYSICS-CONDENSED MATTER
(2022)
Article
Nanoscience & Nanotechnology
Mitchell Semple, Aaron C. Hryciw, Peng Li, Eric Flaim, Ashwin K. Iyer
Summary: This study systematically investigates the use of helium focused ion beam milling of gold for nanoplasmonic metasurface applications, demonstrating the reliable patterning of 10 nm features into gold with complex geometries over a wide area. The results provide strong support for the application of nanoplasmonic metasurfaces in modern research areas.
ACS APPLIED MATERIALS & INTERFACES
(2021)
Article
Multidisciplinary Sciences
Shojan P. Pavunny, Andrew L. Yeats, Hunter B. Banks, Edward Bielejec, Rachael L. Myers-Ward, Matthew T. DeJarld, Allan S. Bracker, D. Kurt Gaskill, Samuel G. Carter
Summary: Point defects in SiC are an ideal platform for quantum information and sensing applications due to their long spin coherence times, optical spin initialization, and spin-dependent fluorescence readout. The precise spatial patterning of arrays of silicon vacancy emitters has been demonstrated in an epitaxial 4H-SiC layer through mask-less focused ion beam implantation, with scalable and reproducible defect generation achieved.
SCIENTIFIC REPORTS
(2021)
Article
Multidisciplinary Sciences
Arne Quellmalz, Xiaojing Wang, Simon Sawallich, Burkay Uzlu, Martin Otto, Stefan Wagner, Zhenxing Wang, Maximilian Prechtl, Oliver Hartwig, Siwei Luo, Georg S. Duesberg, Max C. Lemme, Kristinn B. Gylfason, Niclas Roxhed, Goran Stemme, Frank Niklaus
Summary: The study presents a generic methodology for large-area integration of 2D materials through adhesive wafer bonding, utilizing equipment, processes, and materials readily available in large-scale semiconductor manufacturing lines. This approach is suitable for back end of the line integration of 2D materials on top of integrated circuits, with the potential to accelerate progress in electronics, photonics, and sensing. Existing integration approaches for 2D materials often degrade material properties and are not compatible with industrial processing, highlighting the need for new strategies like adhesive wafer bonding.
NATURE COMMUNICATIONS
(2021)
Article
Engineering, Electrical & Electronic
Alain Yuji Takabayashi, Hamed Sattari, Pierre Edinger, Peter Verheyen, Kristinn B. Gylfason, Wim Bogaerts, Niels Quack
Summary: This article introduces a broadband, compact, and low-loss Silicon Photonic MEMS switch based on a Single-Pole Double-Throw (SPDT) architecture, which can efficiently redirect optical signals to one of two output waveguides on a chip. The switch, with a compact footprint, high extinction ratio, low insertion loss, and fast response time, meets the integration requirements for large-scale reconfigurable Photonic Integrated Circuits.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
(2021)
Article
Chemistry, Multidisciplinary
Alessandro Enrico, Dimitrios Voulgaris, Rebecca Ostmans, Naveen Sundaravadivel, Lucille Moutaux, Aurelie Cordier, Frank Niklaus, Anna Herland, Goran Stemme
Summary: 3D tissue models are important for biomedical research and drug development, and an integrated microvasculature is necessary for optimal cell functions. Conventional bioprinting is limited in creating vessel-like structures, but recent developments in laser photoablation have enabled the generation of complex structures. This study reports a method of in situ 3D patterning of collagen hydrogels using femtosecond laser irradiation to create channels and cavities.
ADVANCED MATERIALS
(2022)
Article
Engineering, Electrical & Electronic
Corrado Carlo Maria Capriata, Sheng Jiang, Johan Akerman, Bengt Gunnar Malm
Summary: A micromagnetic simulation technique is proposed to investigate variability and modal stability, and it is found that physical grains in the free magnetic layer can induce multiple oscillation modes or frequency sidebands.
IEEE ELECTRON DEVICE LETTERS
(2022)
Article
Optics
Pierre Edinger, Alain Yuji Takabayashi, Carlos Errando-Herranz, Umar Khan, Hamed Sattari, Peter Verheyen, Wim Bogaerts, Niels Quack, Kristinn B. Gylfason
Summary: Programmable photonic integrated circuits are gaining attention for various applications, but scalability is limited by the lack of low-power and low-loss phase shifters. The demonstration of a compact phase shifter with low-power photonic MEMS actuation on a silicon photonics foundry platform addresses this challenge and paves the way for scalable programmable photonic integrated circuits.
Article
Chemistry, Physical
Veena Singh, Claudio M. Lousada, Mats Jonsson, Liubov M. Belova
Summary: This paper reports a high throughput method for inkjet printing of nano-structured photocatalytically active TiO2 films, which shows higher photocatalytic performance and mechanical stability compared to films made via the traditional doctor blade method. It suggests that inkjet printing can be an efficient method for the large-scale production of TiO2 photocatalysts.
Article
Biochemical Research Methods
Mikolaj Dobielewski, Janosch Hauser, Olof Beck, Goran Stemme, Niclas Roxhed
Summary: The study demonstrates that dry blood samples enable image-based cell counting of red and white blood cells with a good correlation to gold standard hematology analyzer data, marking a step towards patient-centric complete blood counts.
Article
Materials Science, Multidisciplinary
Lukas Van Iseghem, Ewout Picavet, Alain Yuji Takabayashi, Pierre Edinger, Umar Khan, Peter Verheyen, Niels Quack, Kristinn B. Gylfason, Klaartje De Buysser, Jeroen Beeckman, Wim Bogaerts
Summary: Low-power and compact phase shifters are crucial for large photonic circuits. This work demonstrates a novel structure using liquid crystal for phase shifting, where the liquid crystal is locally deposited on the waveguide to achieve strong electric field control.
OPTICAL MATERIALS EXPRESS
(2022)
Article
Nanoscience & Nanotechnology
Shayan Parhizkar, Maximilian Prechtl, Anna Lena Giesecke, Stephan Suckow, Sophia Wahl, Sebastian Lukas, Oliver Hartwig, Nour Negm, Arne Quellmalz, Kristinn Gylfason, Daniel Schall, Matthias Wuttig, Georg S. Duesberg, Max C. Lemme
Summary: This article describes the study of low-cost, easily integrable photodetectors based on the two-dimensional material PtSe2, which can operate in a higher wavelength range and has high responsivity and low response time. The PtSe2 photodetectors integrated by direct growth outperform those manufactured by the standard 2D layer transfer method. PtSe2 shows promising potential for optoelectronics and photonic-integrated circuits due to its infrared responsivity, chemical stability, selective and conformal growth at low temperatures, and high carrier mobility.
Article
Chemistry, Analytical
Janosch Hauser, Matilda Dale, Olof Beck, Jochen M. Schwenk, Claudia Fredolini, Goeran Stemme, Niclas Roxhed
Summary: Patient-centric sampling strategies involving self sampling and centralized laboratory readout are becoming widely adopted. A capillary-driven microfluidic device is presented here for performing biomarker capturing during sample collection, enabling biohazard-free shipment and utilization of advanced laboratory analytics. The device demonstrates multiplexing capability and applicability to patient-centric workflows using various blood biomarkers. The quantification of a biomarker panel offers new possibilities for e-doctor and e-health applications.
ANALYTICAL CHEMISTRY
(2023)
Article
Chemistry, Multidisciplinary
Alessandro Enrico, Oliver Hartwig, Nikolas Dominik, Arne Quellmalz, Kristinn B. Gylfason, Georg S. Duesberg, Frank Niklaus, Goran Stemme
Summary: The performance of 2D materials makes them promising for electronic, photonic, and sensing devices. However, current lithography methods for patterning these materials are limited in efficiency and can degrade performance. In this study, we demonstrate a noncontact and resist-free patterning method using a two-photon 3D printer, enabling fast and precise fabrication of patterns in 2D materials. This method has the potential to accelerate device prototyping in various research areas.
Article
Physics, Applied
L. Rehm, C. C. M. Capriata, S. Misra, J. D. Smith, M. Pinarbasi, B. G. Malm, A. D. Kent
Summary: In this study, perpendicular magnetic-tunnel-junction nanopillars activated by nanosecond pulses were investigated for their capability to generate true random numbers. The bit streams produced by these devices were found to approximate a normal distribution, pass statistical tests for true randomness, create uniform distributions of random numbers, and have no drift in the bit probability over time. The results show that these pMTJs can generate true random numbers at a rate of about 50 MHz, while being more robust to environmental changes compared to other stochastic nanomagnetic devices.
PHYSICAL REVIEW APPLIED
(2023)
Article
Nanoscience & Nanotechnology
Niels Quack, Alain Yuji Takabayashi, Hamed Sattari, Pierre Edinger, Gaehun Jo, Simon J. Bleiker, Carlos Errando-Herranz, Kristinn B. Gylfason, Frank Niklaus, Umar Khan, Peter Verheyen, Arun Kumar Mallik, Jun Su Lee, Moises Jezzini, Padraic Morrissey, Cleitus Antony, Peter O'Brien, Wim Bogaerts
Summary: Silicon photonics is a mature technology with various applications, such as optical communications, sensing, computing, and quantum information processing. It offers excellent performance, high yield, and high-volume capacity through standardized manufacturing technology. However, the weak electro-optic effects of silicon limit the integration scale. By incorporating MEMS technology, the limitations can be overcome, allowing for compact, low-loss, broadband, fast, and low-power devices. This integration enables the scaling of photonic integrated circuits for telecommunications, neuromorphic computing, sensing, programmable photonics, and quantum computing.
MICROSYSTEMS & NANOENGINEERING
(2023)
Article
Materials Science, Multidisciplinary
Torben Sebastian Last, Simone Pagliano, Theocharis Nikiforos Iordanidis, Frank Niklaus, Goran Stemme, Niclas Roxhed
Summary: The functional area of silicon-based MEMS devices is usually small compared to the overall chip size. The desire to minimize chip size is driven by cost, but the challenges of handling such small devices cannot be solved by standard packaging methods. This study demonstrates the manufacturing and packaging of the world's smallest spray nozzle chip for drug delivery to the lung, and shows how magnetic assembly and microfluidic glue fixation can overcome the barriers associated with small MEMS devices.
ADVANCED MATERIALS TECHNOLOGIES
(2023)
