Fullerene Resist Materials for the 32 nm Node and Beyond

标题
Fullerene Resist Materials for the 32 nm Node and Beyond
作者
关键词
-
出版物
ADVANCED FUNCTIONAL MATERIALS
Volume 18, Issue 13, Pages 1977-1982
出版商
Wiley
发表日期
2008-06-23
DOI
10.1002/adfm.200701155

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