ZnCoO Films by Atomic Layer Deposition - Influence of a Growth Temperature οn Uniformity of Cobalt Distribution

标题
ZnCoO Films by Atomic Layer Deposition - Influence of a Growth Temperature οn Uniformity of Cobalt Distribution
作者
关键词
-
出版物
ACTA PHYSICA POLONICA A
Volume 116, Issue 5, Pages 921-923
出版商
Institute of Physics, Polish Academy of Sciences
发表日期
2016-02-25
DOI
10.12693/aphyspola.116.921

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