ZnO by ALD - Advantages of the Material Grown at Low Temperature

标题
ZnO by ALD - Advantages of the Material Grown at Low Temperature
作者
关键词
-
出版物
ACTA PHYSICA POLONICA A
Volume 116, Issue 5, Pages 814-817
出版商
Institute of Physics, Polish Academy of Sciences
发表日期
2016-02-25
DOI
10.12693/aphyspola.116.814

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