Surface defects and accompanying imperfections in 4H–SiC: Optical, structural and electrical characterization

标题
Surface defects and accompanying imperfections in 4H–SiC: Optical, structural and electrical characterization
作者
关键词
-
出版物
ACTA MATERIALIA
Volume 60, Issue 1, Pages 51-58
出版商
Elsevier BV
发表日期
2011-10-28
DOI
10.1016/j.actamat.2011.09.010

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