期刊
ACTA MATERIALIA
卷 59, 期 15, 页码 6168-6175出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.actamat.2011.06.029
关键词
MAX phases; Thin film; Bilayer; Intercalation; Annealing
资金
- German Academic Exchange Service (DAAD) [A/05/52353]
TiCx/Al bilayer thin films were synthesized using combinatorial magnetron sputtering to study the influence of C content on the reaction products at different annealing temperatures. Based on energy-dispersive X-ray analysis calibrated by elastic recoil detection analysis data, x in TiCx was varied from 0.4 to 1.0. Film constitution was studied by X-ray diffraction before and after annealing at temperatures from 500 to 1000 degrees C. The formation of TiCx and Al in the as-deposited samples over the whole C/Ti range was identified. Upon annealing, TiCx reacts with Alto form Ti-Al-based intermetallics. At temperatures as low as 700 degrees C, the formation of MAX phases (space group P6(3)/mmc) is observed at x <= 0.7. Based on the comparison between the C content induced changes in the lattice spacing of TiCx and Ti2AlC as well as Ti3AlC2, we infer the direct formation of MAX phases by Al intercalation into TiCx for x <= 0.7. (C) 2011 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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