Single-step, rapid low-temperature synthesis of Si quantum dots embedded in an amorphous SiC matrix in high-density reactive plasmas

标题
Single-step, rapid low-temperature synthesis of Si quantum dots embedded in an amorphous SiC matrix in high-density reactive plasmas
作者
关键词
-
出版物
ACTA MATERIALIA
Volume 58, Issue 2, Pages 560-569
出版商
Elsevier BV
发表日期
2009-10-13
DOI
10.1016/j.actamat.2009.09.034

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