Effect of film composition and structure on the crystallization point of atomic layer deposited HfAlOx using metal (diethylamino) precursors and ozone

标题
Effect of film composition and structure on the crystallization point of atomic layer deposited HfAlOx using metal (diethylamino) precursors and ozone
作者
关键词
-
出版物
ACTA MATERIALIA
Volume 56, Issue 4, Pages 710-718
出版商
Elsevier BV
发表日期
2007-12-13
DOI
10.1016/j.actamat.2007.10.017

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