Lithographically Patterned Thin Activated Carbon Films as a New Technology Platform for On-Chip Devices

标题
Lithographically Patterned Thin Activated Carbon Films as a New Technology Platform for On-Chip Devices
作者
关键词
-
出版物
ACS Nano
Volume 7, Issue 8, Pages 6498-6506
出版商
American Chemical Society (ACS)
发表日期
2013-07-02
DOI
10.1021/nn4028129

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