Super-resolution Optical Measurement of Nanoscale Photoacid Distribution in Lithographic Materials

标题
Super-resolution Optical Measurement of Nanoscale Photoacid Distribution in Lithographic Materials
作者
关键词
-
出版物
ACS Nano
Volume 6, Issue 11, Pages 9496-9502
出版商
American Chemical Society (ACS)
发表日期
2012-10-27
DOI
10.1021/nn304285m

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