Metal Contact Engineering and Registration-Free Fabrication of Complementary Metal-Oxide Semiconductor Integrated Circuits Using Aligned Carbon Nanotubes

标题
Metal Contact Engineering and Registration-Free Fabrication of Complementary Metal-Oxide Semiconductor Integrated Circuits Using Aligned Carbon Nanotubes
作者
关键词
-
出版物
ACS Nano
Volume 5, Issue 2, Pages 1147-1153
出版商
American Chemical Society (ACS)
发表日期
2011-01-28
DOI
10.1021/nn1027856

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