Novel Vapor-Phase Synthesis of Flexible, Homogeneous Organic–Inorganic Hybrid Gate Dielectric with sub 5 nm Equivalent Oxide Thickness

标题
Novel Vapor-Phase Synthesis of Flexible, Homogeneous Organic–Inorganic Hybrid Gate Dielectric with sub 5 nm Equivalent Oxide Thickness
作者
关键词
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出版物
ACS Applied Materials & Interfaces
Volume -, Issue -, Pages -
出版商
American Chemical Society (ACS)
发表日期
2018-09-19
DOI
10.1021/acsami.8b12716

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