4.8 Article

Laser Direct Synthesis and Patterning of Silver Nano/Microstructures on a Polymer Substrate

期刊

ACS APPLIED MATERIALS & INTERFACES
卷 6, 期 16, 页码 14576-14582

出版社

AMER CHEMICAL SOC
DOI: 10.1021/am503897r

关键词

metal patterning; laser direct write; flexible electronics

资金

  1. Ministry of Science and Technology of Taiwan, R.O.C. [NSC 102-2221-E-005-035-MY2, MOST 103-3113-E-006-005]

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This study presents a novel approach for the rapid fabrication of conductive nano/microscale metal structures on flexible polymer substrate (polyimide). Silver film is simultaneously synthesized and patterned on the polyimide substrate using an advanced continuous wave (CW) laser direct writing technology and a transparent, particle-free reactive silver ion ink. The location and shape of the resulting silver patterns are written by a laser beam from a digitally controlled micromirror array device. The silver patterns fabricated by this laser direct synthesis and patterning (LDSP) process exhibit the remarkably low electrical resistivity of 2.1 mu Omega cm, which is compatible to the electrical resistivity of bulk silver. This novel LDSP process requires no vacuum chamber or photomasks, and the steps needed for preparation of the modified reactive silver ink are simple and straightforward. There is none of the complexity and instability associated with the synthesis of the nanoparticles that are encountered for the conventional laser direct writing technology which involves nanoparticle sintering process. This LDSP technology is an advanced method of nano/microscale selective metal patterning on flexible substrates that is fast and environmentally benign and shows potential as a feasible process for the roll-to-roll manufacturing of large area flexible electronic devices.

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