Wicking Nanopillar Arrays with Dual Roughness for Selective Transport and Fluorescence Measurements

Silicon nanopillars are important building elements for innovative nanoscale systems with unique optical, wetting, and chemical separation functionalities. However, technologies for creating expansive pillars arrays on the submicron scale are often complex and with practical time, cost, and method limitations. Herein we demonstrate the rapid fabrication of nanopillar arrays using the thermal dewetting of Pt films with thicknesses in the range from 5 to 19 nm followed by anisotropic reactive ion etching (RIE) of the substrate materials. A second level of roughness on the sub-30 nm scale is added by overcoating the silicon nanopillars with a conformal layer of porous silicon oxide (PSO) using room temperature plasma enhanced chemical vapor deposition (PECVD). This technique produced environmentally conscious, economically feasible, expansive nanopillar arrays with a production pathway scalable to industrial demands. The arrays were systematically analyzed for size, density, and variability of the pillar dimensions. We show that these stochastic arrays exhibit rapid wicking of various fluids and, when functionalized with a physiosorbed layer of silicone oil, act as a superhydrophobic surface. We also demonstrate high brightness fluorescence and selective transport of model dye compounds on surfaces of the implemented nanopillar arrays with two-tier roughness. The demonstrated combination of functionalities creates a platform with attributes inherently important for advanced separations and chemical analysis.