Exploration of Plasma-Enhanced Chemical Vapor Deposition as a Method for Thin-Film Fabrication with Biological Applications

标题
Exploration of Plasma-Enhanced Chemical Vapor Deposition as a Method for Thin-Film Fabrication with Biological Applications
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 5, Issue 10, Pages 3983-3994
出版商
American Chemical Society (ACS)
发表日期
2013-05-14
DOI
10.1021/am302989x

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