Accelerated Formation of Metal Oxide Thin Film at 200 °C Using Oxygen Supplied by a Nitric Acid Additive and Residual Organic Suction Vacuum Annealing for Thin-Film Transistor Applications

标题
Accelerated Formation of Metal Oxide Thin Film at 200 °C Using Oxygen Supplied by a Nitric Acid Additive and Residual Organic Suction Vacuum Annealing for Thin-Film Transistor Applications
作者
关键词
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出版物
ACS Applied Materials & Interfaces
Volume 5, Issue 18, Pages 9051-9056
出版商
American Chemical Society (ACS)
发表日期
2013-08-20
DOI
10.1021/am4022818

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