Structural, Chemical, Optical, and Electrical Evolution of SnOx Films Deposited by Reactive rf Magnetron Sputtering

标题
Structural, Chemical, Optical, and Electrical Evolution of SnOx Films Deposited by Reactive rf Magnetron Sputtering
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 4, Issue 10, Pages 5673-5677
出版商
American Chemical Society (ACS)
发表日期
2012-10-02
DOI
10.1021/am301601s

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