Experimental study on polishing performance of CeO2 and nano-SiO2 mixed abrasive

标题
Experimental study on polishing performance of CeO2 and nano-SiO2 mixed abrasive
作者
关键词
CeO<sub>2</sub>, SiO<sub>2</sub>, Composite abrasives, Characterization, Chemical mechanical polishing
出版物
Applied Nanoscience
Volume 8, Issue 1-2, Pages 163-171
出版商
Springer Nature
发表日期
2018-02-03
DOI
10.1007/s13204-018-0657-4

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