Silicon nanosprings fabricated by glancing angle deposition for ultra-compliant films and interfaces

标题
Silicon nanosprings fabricated by glancing angle deposition for ultra-compliant films and interfaces
作者
关键词
-
出版物
MATERIALS & DESIGN
Volume 144, Issue -, Pages 182-191
出版商
Elsevier BV
发表日期
2018-02-06
DOI
10.1016/j.matdes.2018.02.017

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