Wafer Map Failure Pattern Recognition and Similarity Ranking for Large-Scale Data Sets

出版年份 2015 全文链接

标题

Wafer Map Failure Pattern Recognition and Similarity Ranking for Large-Scale Data Sets

作者

关键词

-

出版物

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

Volume 28, Issue 1, Pages 1-12

出版商

Institute of Electrical and Electronics Engineers (IEEE)

发表日期

2014-10-22

DOI

10.1109/tsm.2014.2364237

向作者/读者发起求助以获取更多资源

Protocol

Reagent

Reprint

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

© Peeref 2019-2024. All rights reserved.