标题
12−μm
-Pitch Electromechanical Resonator for Thermal Sensing
作者
关键词
-
出版物
Physical Review Applied
Volume 9, Issue 2, Pages -
出版商
American Physical Society (APS)
发表日期
2018-02-16
DOI
10.1103/physrevapplied.9.024016
参考文献
相关参考文献
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