Free-standing planar thermoelectric microrefrigerators based on nano-grained SiGe thin films for on-chip refrigeration

标题
Free-standing planar thermoelectric microrefrigerators based on nano-grained SiGe thin films for on-chip refrigeration
作者
关键词
-
出版物
Nano Energy
Volume 48, Issue -, Pages 202-210
出版商
Elsevier BV
发表日期
2018-03-22
DOI
10.1016/j.nanoen.2018.03.054

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