Thermal Studies of Nanoporous Si Films with Pitches on the Order of 100 nm —Comparison between Different Pore-Drilling Techniques
出版年份 2018 全文链接
标题
Thermal Studies of Nanoporous Si Films with Pitches on the Order of 100 nm —Comparison between Different Pore-Drilling Techniques
作者
关键词
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出版物
Scientific Reports
Volume 8, Issue 1, Pages -
出版商
Springer Nature
发表日期
2018-06-07
DOI
10.1038/s41598-018-26872-w
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