期刊
SURFACE & COATINGS TECHNOLOGY
卷 343, 期 -, 页码 101-107出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2017.10.062
关键词
Iridium thin film; Radio-frequency magnetron sputtering; Nanostructure; Density; Surface micro -roughness; X-ray reflectivity
资金
- INTRAAST (German acronym for INdustry TRAnsfer of AStronomical mirror Technologies) project [VIII.2-F1116.AS/10]
- JEUMICO (Joint European MIrror COmpetence) project [I 120-01h/844 JC / 8]
- Bavarian State Ministry for Education and Culture, Sciences and Art (Germany)
- Ministry of Education, Youth and Sports of the Czech Republic
Reflective mirror coatings made of iridium are used in X-ray telescopes of the Chandra X-ray Observatory (CXO) launched in 1999 by the National Aeronautics and Space Administration (NASA) to investigate astronomical sources at photon energies below 10 keV. These coatings were produced in a DC magnetron sputtering process and have so far proven their suitability for space-based applications. We are considering in the present paper the processing of thin iridium films for lightweight telescopes using the radio frequency magnetron sputtering technique with an oblique angle deposition. The coating development presented here is focused on the influence of total sputtering pressure on film properties as well as on its impact on the mirror's performance. Characterisation methods such as X-ray diffractometry, X-ray reflectometry, atomic force microscopy and transmission electron micro-scopy have been used. Correlations between morphology, density, surface micro roughness, crystal structure of the iridium layer and the expected reflectivity of the X-ray mirror are described and discussed.
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