Growth of nanocolumnar porous TiO 2 thin films by magnetron sputtering using particle collimators

出版年份 2018 全文链接

标题

作者

关键词

Reactive magnetron sputtering, TiO, 2, Oblique angle deposition, Porous thin films, PVD, GLAD

出版物

Volume 343, Issue -, Pages 172-177

出版商

Elsevier BV

发表日期

2017-09-20

DOI

10.1016/j.surfcoat.2017.09.039

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