Single-crystalline Si nanowires fabrication by one-step metal assisted chemical etching: The effect of etching time and resistivity of Si wafer

标题
Single-crystalline Si nanowires fabrication by one-step metal assisted chemical etching: The effect of etching time and resistivity of Si wafer
作者
关键词
1-MACE, SiNWs, Si wafer resistivity, Etching duration, TEM, SAED
出版物
SUPERLATTICES AND MICROSTRUCTURES
Volume 120, Issue -, Pages 517-524
出版商
Elsevier BV
发表日期
2018-06-12
DOI
10.1016/j.spmi.2018.06.023

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