Fabrication of porous silicon filled Pd/SiC nanocauliflower thin films for high performance H 2 gas sensor

标题
Fabrication of porous silicon filled Pd/SiC nanocauliflower thin films for high performance H 2 gas sensor
作者
关键词
DC co-sputtering, Nanocauliflowers (NCs), Porous silicon (PS), Hydrogen gas sensor
出版物
SENSORS AND ACTUATORS B-CHEMICAL
Volume 264, Issue -, Pages 10-19
出版商
Elsevier BV
发表日期
2018-02-26
DOI
10.1016/j.snb.2018.02.164

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