Simple fabrication method of silicon/tungsten oxide nanowires heterojunction for NO 2 gas sensors

标题
Simple fabrication method of silicon/tungsten oxide nanowires heterojunction for NO 2 gas sensors
作者
关键词
Heterojunction, Gas sensor, Tungsten oxide nanowire, MEMS fabrication, Stress-induced growth method, Nitrogen dioxide
出版物
SENSORS AND ACTUATORS B-CHEMICAL
Volume 265, Issue -, Pages 522-528
出版商
Elsevier BV
发表日期
2018-03-19
DOI
10.1016/j.snb.2018.03.100

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