期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 269, 期 -, 页码 308-312出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2017.11.055
关键词
Photonic crystal cavity; Photonic thermometry resistance thermometer
资金
- Intramural NIST DOC [9999-NIST] Funding Source: Medline
Resistance thermometry provides a time-tested method for taking temperature measurements that has been painstakingly developed over the last century. However, fundamental limits to resistance-based approaches along with a desire to reduce the cost of sensor ownership and increase sensor stability has produced considerable interest in developing photonic temperature sensors. Here we demonstrate that silicon photonic crystal cavity-based thermometers can measure temperature with uncertainities of 175 mK (k =1), where uncertainties are dominated by ageing effects originating from the hysteresis in the device packaging materials. Our results, a approximate to 4-fold improvement over recent developments, clearly demonstate the rapid progress of silicon photonic sensors in replacing legacy devices. Published by Elsevier B.V.
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