Avoiding blister defects in low-stress hydrogenated amorphous silicon films for MEMS sensors

出版年份 2018 全文链接

标题

作者

关键词

Blister defect, Stress control, Hydrogenated amorphous silicon thin film, MEMS, Annealing

出版物

Volume 276, Issue -, Pages 11-16

出版商

Elsevier BV

发表日期

2018-04-14

DOI

10.1016/j.sna.2018.04.021

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