Electrostatic compensation of structural imperfections in dynamically amplified dual-mass gyroscope

出版年份 2018 全文链接

标题

作者

关键词

MEMS gyroscope, Dual-mass system, Precision electrostatic tuning, Fabrication imperfections, Anisoelasticity, Frequency split

出版物

SENSORS AND ACTUATORS A-PHYSICAL

Volume 275, Issue -, Pages 99-108

出版商

Elsevier BV

发表日期

2018-03-29

DOI

10.1016/j.sna.2018.03.001

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