The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO2 Films Deposited by Atomic Layer Deposition

标题
The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO2 Films Deposited by Atomic Layer Deposition
作者
关键词
-
出版物
SENSORS
Volume 18, Issue 3, Pages 735
出版商
MDPI AG
发表日期
2018-03-02
DOI
10.3390/s18030735

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