Permittivity of Oxidized Ultra-Thin Silicon Films From Atomistic Simulations

标题
Permittivity of Oxidized Ultra-Thin Silicon Films From Atomistic Simulations
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 36, Issue 10, Pages 1076-1078
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2015-08-13
DOI
10.1109/led.2015.2465850

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