Six-beam homodyne laser Doppler vibrometry based on silicon photonics technology

This paper describes an integrated six-beam homodyne laser Doppler vibrometry (LDV) system based on a silicon-on-insulator (SOI) full platform technology, with on-chip photo-diodes and phase modulators. Electronics and optics are also implemented around the integrated photonic circuit (PIC) to enable a simultaneous six-beam measurement. Measurement of a propagating guided elastic wave in an aluminum plate (speed approximate to 909 m/s @ 61.5 kHz) is demonstrated. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement