4.6 Article

Aluminum nitride integrated photonics platform for the ultraviolet to visible spectrum

期刊

OPTICS EXPRESS
卷 26, 期 9, 页码 11147-11160

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OPTICAL SOC AMER
DOI: 10.1364/OE.26.011147

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  1. Air Force Office of Scientific Research Multidisciplinary University Research Initiative [FA9550-14-1-0052]
  2. Air Force Research Laboratory RITA program [FA8750-14-2-0120, FA8750-16-2-0140]
  3. Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA), via Raytheon BBN Technologies Corp. [2017-17063000002]

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We demonstrate a wide-bandgap semiconductor photonics platformbased on nanocrystalline aluminum nitride (AlN) on sapphire. This photonics platform guides light at low loss from the ultraviolet (UV) to the visible spectrum. We measure ring resonators with intrinsic quality factor (Q) exceeding 170,000 at 638 nm and Q > 20,000 down to 369.5 nm, which shows a promising path for low-loss integrated photonics in UV and visible spectrum. This platform opens up new possibilities in integrated quantum optics with trapped ions or atom-like color centers in solids, as well as classical applications including nonlinear optics and on-chip UV-spectroscopy. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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