Direct submicron patterning of titanium for bone implants

标题
Direct submicron patterning of titanium for bone implants
作者
关键词
Electron beam lithography, Reactive ion etching, Titanium, Direct patterning, Submicron, Bone implants
出版物
MICROELECTRONIC ENGINEERING
Volume 195, Issue -, Pages 13-20
出版商
Elsevier BV
发表日期
2018-03-20
DOI
10.1016/j.mee.2018.03.018

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