In situ monitoring of atomic layer epitaxy via optical ellipsometry

标题
In situ monitoring of atomic layer epitaxy via optical ellipsometry
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 51, Issue 12, Pages 125306
出版商
IOP Publishing
发表日期
2018-02-01
DOI
10.1088/1361-6463/aaac64

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