MEMS electret energy harvester with embedded bistable electrostatic spring for broadband response

标题
MEMS electret energy harvester with embedded bistable electrostatic spring for broadband response
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 28, Issue 10, Pages 104001
出版商
IOP Publishing
发表日期
2018-05-31
DOI
10.1088/1361-6439/aac8cc

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