A thickness-mode piezoelectric micromachined ultrasound transducer annular array using a PMN–PZT single crystal

标题
A thickness-mode piezoelectric micromachined ultrasound transducer annular array using a PMN–PZT single crystal
作者
关键词
-
出版物
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 28, Issue 7, Pages 075015
出版商
IOP Publishing
发表日期
2018-03-27
DOI
10.1088/1361-6439/aab9d4

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