Fabrication of sputtered titanium vanadium nitride (TiVN) thin films for micro-supercapacitors

标题
Fabrication of sputtered titanium vanadium nitride (TiVN) thin films for micro-supercapacitors
作者
关键词
-
出版物
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 29, Issue 14, Pages 12457-12465
出版商
Springer Nature
发表日期
2018-06-06
DOI
10.1007/s10854-018-9364-x

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