Solving the critical thermal bowing in 3C-SiC/Si(111) by a tilting Si pillar architecture

标题
Solving the critical thermal bowing in 3C-SiC/Si(111) by a tilting Si pillar architecture
作者
关键词
-
出版物
JOURNAL OF APPLIED PHYSICS
Volume 123, Issue 18, Pages 185703
出版商
AIP Publishing
发表日期
2018-05-10
DOI
10.1063/1.5019325

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