期刊
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
卷 72, 期 -, 页码 244-252出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.ijrmhm.2017.12.003
关键词
Tantalum; Annealing temperature; Orientation dependence; Recrystallization texture; Grain shape; Recovery
资金
- National Natural Science Foundation of China [51421001, 51504051]
- Major National Science and Technology Projects of China [2011ZX02705]
- Chongqing Research Program of Basic Research and Frontier Technology [cstc2017jcyjAX0094, cstc2015jcyjA90001]
The recrystallization behavior of tantalum was investigated under two different annealing regimes, i.e. long-time annealing at low temperatures (LALT) and short-time annealing at high temperatures (SAHT), aiming to elucidate how annealing schedule arouses not only different texture evolution but grain shape as well. The texture and grain morphologies at each recrystallization stage were revealed by Electron Back-Scatter Diffraction (EBSD) technique. LALT was observed to enhance the {100} texture (< 100 >//ND (normal direction)) while simultaneously suppressing the {111} texture (< 111 >//ND); whereas a reverse trend of texture evolution was observed under SAHT. In terms of grain shape, different from the near-equiaxed grains introduced by LALT, SAHT resulted in lots of elongated grains with random orientations (i.e. orientations except for {111}< uvw > and {100}< uvw >). The formation mechanism of elongated grains was established. It is anticipated that results in this study would provide guidelines for microstructural optimization of Ta sputtering targets.
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