Z-axis tuning fork gyroscope having a controlled anti-phase and freestanding architecture: design and fabrication

标题
Z-axis tuning fork gyroscope having a controlled anti-phase and freestanding architecture: design and fabrication
作者
关键词
-
出版物
International Journal of Nanotechnology
Volume 15, Issue 1/2/3, Pages 14
出版商
Inderscience Publishers
发表日期
2018-01-31
DOI
10.1504/ijnt.2018.089557

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